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Range/Gas: 8 SLM
Part No: NCI-12RG
Part No: 4S018-764
It was removed from a KLA Tencor AIT UV
Digital Dynamics 27-152970-00N sioc Controller Module Novellus Systems Working Range/Gas: 8 SLMDigital Dynamics 27 152970 00N sioc Controller Module Novellus Used Working Inventory # K 6166 This Digital Dynamics 27 152970 00N Sioc Controller Module is used working surplus. The physical condition is good, but there are signs of previous use and handling. Specifications Part No: 27 152970 00N Model No: sioc CONTROLLER Software Version: Revision A, Ver. 4. 6 Sale Details Item Condition: Used Working, 90 Day Warranty Estimated Packed Shipping
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